Particulate contamination on polysilicon feedstock

Analyses of weakly adhered surface contamination and bulk impurities can be applied to polysilicon without phase transition. Testing for particles and dust is particularly important for polysilicon granules (CroBmann and Derzmann, 2006; Ginafranco, 2002; Hashim et al., 2007; Kenji et al., 2005).

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