ANALYTICAL METHODS OF POLYSILICON AND THEIR STANDARDIZATION

In Section 5.1, we listed relevant properties of polysilicon which affect the performance of solar PV applications and HVM cell processing. SEMI PV17 provides a specification for four different categories of polysilicon feedstock[9] with a list of standardized or generally practiced analytical methods (SEMI PV17-0611, n. d.). The performance of solar cells is limited by the impurities in SG-Si, therefore sensitive trace-analytical methods are applied for controlling the purity of polysilicon (Pizzini et al., 1986). Here we provide an overview ofthe most important analytical methods as applied to process and product control.