Tokki, manufacturers of vacuum process equipments and factory automation systems, developed the first OLED mass production system back in 1999, which processed both OLED/electrode material deposition and encapsulation by one system. Tokki’s OLED production system has been delivered to most of the small molecule OLED manufacturers in Japan, Korea, and Taiwan [165]. In November 2007, Canon Inc of Japan officially decided to acquire Tokki Corp of Japan [166]. In June 2010, Canon announced that it would make Tokki its wholly owned subsidiary. Canon already has experience in manufacturing solar cells using amorphous Si technology.
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